Izinto ezijoliswe kuzo zineemfuno eziphezulu ngexesha lokusetyenziswa, kungekhona nje ukucoceka kunye nobukhulu be-particle, kodwa kunye nobukhulu obufanayo.Ezi mfuno ziphezulu zisenza ukuba sinikele ingqalelo ngakumbi xa sisebenzisa izinto ezijoliswe kuzo sputtering.
1. Ukulungiselela ukutshiza
Kubaluleke kakhulu ukugcina ukucoceka kwegumbi le-vacuum, ngakumbi inkqubo yokutshiza.I-Lubricant, uthuli, kunye nayiphi na intsalela evela kwiingubo zangaphambili zinokuqokelela izinto ezingcolileyo ezifana namanzi, ezichaphazela ngokuthe ngqo i-vacuum kunye nokwandisa amathuba okuba kungabikho ukubunjwa kwefilimu.Iisekethe ezimfutshane, i-arcing ejoliswe kuyo, iindawo ezenza ifilimu ezirhabaxa, kunye nokungcoliswa kweekhemikhali ezigqithisileyo zidla ngokubangelwa ngamagumbi angacocekanga okutshiza, imipu kunye nezinto ekujoliswe kuzo.
Ukuze kugcinwe iimpawu zokubunjwa kwengubo, i-sputtering gas (i-argon okanye i-oksijeni) kufuneka ihlambuluke kwaye yome.Emva kokufaka i-substrate kwigumbi lokutshiza, umoya kufuneka ukhutshwe ukuze ufezekise umgangatho ofunekayo wokucoca inkqubo.
2. Ukucoca ekujoliswe kuko
Injongo yokucoca ekujoliswe kuyo kukususa naluphi na uthuli okanye ukungcola okunokuthi kubekho phezu kwendawo ekujoliswe kuyo.
3. Ufakelo ekujoliswe kulo
Eyona nto ibalulekileyo ekufuneka uyibeke ingqalelo ngexesha lokufakwa kwezinto ezijoliswe kuyo kukuqinisekisa uxhulumaniso oluhle lwe-thermal phakathi kwezinto ezijoliswe kuyo kunye nodonga olupholileyo lwesibhamu se-sputtering.Ukuba udonga lokupholisa okanye i-back plate iphazamiseke kakhulu, inokubangela ukuqhekeka okanye ukugoba ngexesha lokufakwa kwezinto ezijoliswe kuyo.Ukutshintshwa kobushushu ukusuka kwithagethi yangasemva ukuya kwizinto ezijoliswe kuzo kuya kuchaphazeleka kakhulu, kubangele ukungakwazi ukutshabalalisa ukushisa ngexesha lokutshiza, ekugqibeleni kukhokelela ekuqhekekeni okanye ukuphambuka kwezinto ezijoliswe kuyo.
4. Isiphaluka esifutshane kunye nokuhlolwa kokutywinwa
Emva kokufakwa kwezinto ezijoliswe kuyo, kuyimfuneko ukujonga isiphaluka esifutshane kunye nokutywinwa kwe-cathode yonke.Kunconywa ukusebenzisa i-ohmmeter kunye ne-megohmmeter ukujonga ukuba i-cathode ifutshane.Emva kokuqinisekisa ukuba i-cathode ayikho isiphaluka esifutshane, ukufumanisa ukuvuza kunokuqhutywa ngokujova amanzi kwi-cathode ukugqiba ukuba kukho ukuvuza.
5. Imathiriyeli ekujoliswe kuyo kwangaphambili
Kucetyiswa ukuba kusetyenziswe igesi ye-argon ecocekileyo yokutshiza kwangaphambili kwezinto ezijoliswe kuzo, ezinokucoca umphezulu wento ekujoliswe kuyo.Kuyacetyiswa ukuba unyuse kancinci amandla okutshiza ngexesha lenkqubo yokutshiza kwangaphambili kwizinto ekujoliswe kuzo.Amandla ezinto ezijoliswe kuzo ceramic
Ixesha lokuposa: Oct-19-2023