Sonke siyazi ukuba i-sputtering yenye yetekhnoloji ephambili yokulungiselela izinto zefilimu.Isebenzisa ii-ion eziveliswe ngumthombo we-ion ukukhawulezisa udibaniso kwi-vacuum ukwenza umqadi we-ion onesantya esiphezulu, ibhombu indawo eqinileyo, kunye nee-ion zotshintshiselwano lwamandla ekinetic ngeeathom kumphezulu oqinileyo, ukuze iiathom kwindawo eqinileyo. umphezulu shiya okuqinileyo kunye nediphozithi kumphezulu we-substrate.Ibhombu eqinileyo yimathiriyeli ekrwada yokufaka ifilim ngokutshiza, okubizwa ngokuba yithagethi ye-sputtering.
Iindidi ezahlukahlukeneyo zezixhobo zefilimu ezitshisiweyo zisetyenziswe ngokubanzi kwiisekethe ezidibeneyo ze-semiconductor, imidiya yokurekhoda, umboniso weplani, isixhobo kunye ne-die surface coating njalo njalo.
Iithagethi ze-sputtering zisetyenziswa ikakhulu kumashishini e-elektroniki kunye nolwazi, njengeesekethe ezidibeneyo, ukugcinwa kolwazi, imiboniso yekristale yolwelo, iinkumbulo ze-laser, izixhobo zokulawula i-elektroniki, njl.Inokusetyenziswa kwakhona kwintsimi yeglasi yokugqoka;Isenokusetyenziswa kwizinto ezikwaziyo ukunxiba, ukumelana nobushushu obuphezulu be-corrosion, iimveliso zokuhombisa eziphezulu kunye namanye amashishini.
Kukho iintlobo ezininzi zeethagethi ze-sputtering, kwaye kukho iindlela ezahlukeneyo zokuhlelwa kweethagethi:
Ngokutsho kokubunjwa, kunokwahlulwa kwithagethi yesinyithi, i-alloy target kunye ne-ceramic compound target.
Ngokwemilo, inokwahlulwa ibe yithagethi ende, ithagethi yesikwere kunye nethagethi ejikelezayo.
Iyakwazi ukwahlula kwithagethi ye-microelectronic, i-target ye-magnetic yokurekhoda, i-optical disk target, i-target yensimbi exabisekileyo, i-target resistance target, i-film resistance target, i-target ye-conductive film, i-face modification target, i-mask target, i-decorative layer target, i-electrode target kunye nezinye iinjongo ngokubhekiselele kwintsimi yesicelo.
Ngokwezicelo ezahlukeneyo, inokwahlulwa ibe kuthagethi lwe-ceramic enxulumene nesemiconductor, ukurekhodwa okuphakathi kweethagethi zekeramic, iithagethi ze-ceramic zokubonisa, iithagethi ze-ceramic ze-superconducting kunye neethagethi ezinkulu ze-ceramic ze-magnetoresistance.
Ixesha lokuposa: Jul-29-2022