Okwangoku, phantse zonke iithagethi zobhedu ze-ultra-high ezicocekileyo ezifunwa lishishini le-IC zilawulwa ziinkampani ezininzi zamazwe ngamazwe.Zonke iithagethi zobhedu ze-ultrapure ezifunekayo kushishino lwasekhaya lwe-IC kufuneka zingeniswe ngaphandle, ezingabizi nje kuphela, kodwa ziphinde zibe nzima kwiinkqubo zokungenisa elizweni Ngoko ke, i-China ifuna ngokukhawuleza ukuphucula uphuhliso kunye nokuqinisekiswa kwe-ultra-high purity (6N) iithagethi zokutshiza ubhedu. .Makhe sijonge amanqaku aphambili kunye nobunzima ekuphuhliseni i-ultra-high purity (6N) iithagethi ze-copper sputtering.
1,Ukuphuhliswa kwezinto ezicocekileyo eziphezulu
Itekhnoloji yokucoca i-Cu, i-Al kunye ne-Ta yesinyithi e-China ikude kakhulu kumazwe aphuhlileyo.Okwangoku, uninzi lwezinyithi ezicocekileyo ezinokunikezelwa azikwazi ukuhlangabezana neemfuno zomgangatho weesekethe ezidityanisiweyo zokujoliswa kwe-sputtering ngokwesiqhelo zonke iindlela zokuhlalutya izinto kwishishini.Inani lokubandakanywa koko kujoliswe kuko liphezulu kakhulu okanye lisasazwe ngokungalinganiyo.Amacandelo ahlala enziwe kwi-wafer ngexesha lokutshiza, okukhokelela kwisekethe emfutshane okanye isiphaluka esivulekileyo soqhagamshelwano, oluchaphazela kakhulu ukusebenza kwefilimu.
2,Uphuhliso lwetekhnoloji yokulungiselela ekujoliswe kuko ukutshiza kobhedu
Uphuhliso lwethekhnoloji yokulungiselela okujoliswe kuko ukutshiza kobhedu ijolise ikakhulu kwimiba emithathu: ubungakanani beenkozo, ulawulo lokuqhelaniswa nokufana.Umzi-mveliso we-semiconductor unezona mfuno ziphezulu zokugalela iithagethi kunye nokukhupha imathiriyeli ekrwada.Ineemfuno ezingqongqo kakhulu zokulawula ubungakanani benkozo yomhlaba kunye nokuqhelaniswa nekristale ekujoliswe kuyo.Ubungakanani beenkozo ekujoliswe kuzo kufuneka balawulwe kwi-100μ M ngaphantsi, ngoko ke, ukulawulwa kobungakanani bengqolowa kunye neendlela zokuhlalutya ukulungelelaniswa kunye nokufumanisa kubaluleke kakhulu ekuphuhlisweni kweethagethi zetsimbi.
3,Uphuhliso lohlalutyo kunyeuvavanyo iteknoloji
Ukucoceka okuphezulu koko kujoliswe kuko kuthetha ukuncitshiswa kobumdaka.Kwixesha elidlulileyo, i-plasma edibeneyo (i-ICP) kunye ne-atomic absorption spectrometry yayisetyenziselwa ukumisela ukungcola, kodwa kwiminyaka yakutshanje, uhlalutyo lwekhwalithi yokukhutshwa okukhanyayo (GDMS) kunye novakalelo oluphezulu luye lwasetyenziswa ngokuthe ngcembe njengomgangatho. indlela.Indlela eseleyo yokumelana ne-RRR isetyenziselwa ukumisela ukucoceka kombane.Umgaqo wayo wokumisela kukuvavanya ukucoceka kwesiseko sesinyithi ngokulinganisa iqondo lokusasazwa kwe-elektroniki kokungcola.Ngenxa yokuba kukulinganisa ukumelana nobushushu begumbi kunye nobushushu obuphantsi kakhulu, kulula ukuthatha inani.Kwiminyaka yakutshanje, ukuze kuphononongwe undoqo wesinyithi, uphando kwi-ultra-high purity lusebenza kakhulu.Kule meko, ixabiso le-RRR yindlela efanelekileyo yokuvavanya ubunyulu.
Ixesha lokuposa: May-06-2022