Uphononongo olutsha kwijenali yeDayimane kunye neZixhobo eziNxulumene nazo zijolise ekuhonjisweni kwedayimani yepolycrystalline ngeFeCoB etchant ukwenza iipateni.Ngenxa yolu tshintsho luphuculweyo lweteknoloji, umphezulu wedayimani unokufumaneka ngaphandle komonakalo kunye neziphene ezimbalwa.
UPhando: Ukuchongwa kwe-Spatial ekhethiweyo yedayimani kwindawo eqinileyo kusetyenziswa i-FeCoB enepateni yefotolithographic.Umfanekiso wekhredithi: Bjorn Wilezic/Shutterstock.com
Ngokusebenzisa inkqubo yokusabalalisa i-solid-state, iifilimu ze-FeCoB nanocrystalline (Fe: Co: B = 60: 20: 20, umlinganiselo we-athomu) unokufezekisa ukujoliswa kwe-lattice kunye nokupheliswa kweedayimani kwi-microstructure.
Iidayimani zineempawu ezizodwa ze-biochemical kunye nembonakalo, kunye nokunwebeka okuphezulu kunye namandla.Ukuqina kwayo okugqithisileyo kungumthombo obalulekileyo wenkqubela phambili kwi-ultra precision machining (i-diamond yokuguqula iteknoloji) kunye nendlela eya kwiingcinezelo ezigqithiseleyo kuluhlu lwamakhulu e-GPa.
Ukunganyangeki kweekhemikhali, ukuqina okubonakalayo kunye nomsebenzi webhayoloji wonyusa amathuba oyilo lweenkqubo ezisebenzisa ezi mpawu zisebenzayo.Idayimane izenzele igama kwiinkalo ze-mechatronics, optics, sensors kunye nolawulo lwedatha.
Ukwenzela ukuba ukusetyenziswa kwazo kube lula, ukudityaniswa kwedayimani kunye nepateni yazo kudala iingxaki ezicacileyo.I-reactive ion etching (RIE), i-plasma edityanisiweyo nge-inductively (ICP), kunye ne-electron beam induced etching yimizekelo yeenkqubo ezikhoyo zenkqubo ezisebenzisa iindlela zokudibanisa (EBIE).
Izakhiwo zedayimani nazo zenziwe ngokusebenzisa i-laser kunye ne-ioning beam (FIB) yobuchule bokucwangcisa.Injongo yobu buchule bokwenziwa kukukhawulezisa ukuchithwa kunye nokuvumela ukunyuswa kwiindawo ezinkulu kwizakhiwo zemveliso ezilandelelanayo.Ezi nkqubo zisebenzisa i-etchants yolwelo (i-plasma, iigesi, kunye nezisombululo zolwelo), ezithintela ukuntsonkotha kwejometri okufikelelekayo.
Lo msebenzi uphantsi wophononongo lokukhutshwa kwezinto ngokuvelisa umphunga wekhemikhali kwaye udala idayimani ye-polycrystalline ene-FeCoB (Fe:Co:B, 60:20:20 ipesenti ye-atomic) kumphezulu.Ingqwalasela ephambili ihlawulwe ekudalweni kweemodeli ze-TM ze-etching echanekileyo yezakhiwo zemitha-scale kwiidayimani.Idayimani engaphantsi ibophelelwe kwi-nanocrystalline FeCoB ngonyango lokushisa kwi-700 ukuya kwi-900 ° C kwi-30 ukuya kwi-90 imizuzu.
Umaleko ococekileyo wesampulu yedayimani ubonisa i-polycrystalline microstructure engaphantsi.Uburhabaxa (Ra) ngaphakathi kwesuntswana ngalinye laliyi-3.84 ± 0.47 nm, kwaye uburhabaxa bubonke bobuso babuyi-9.6 ± 1.2 nm.Uburhabaxa (ngaphakathi kwenkozo yedayimane enye) yomaleko wesinyithi omiliselweyo we-FeCoB yi-3.39 ± 0.26 nm, kwaye ubude bomaleko yi-100 ± 10 nm.
Emva kokuba i-annealing kwi-800 ° C ye-30 min, ubukhulu bentsimbi yentsimbi bunyuke ukuya kwi-600 ± 100 nm, kunye nobukhulu bomhlaba (Ra) bunyuke ukuya kwi-224 ± 22 nm.Ngexesha le-annealing, iiathomu zekhabhoni zisasazeka kwi-FeCoB layer, ekhokelela ekwandeni kobukhulu.
Iisampulu ezintathu ezineengqimba ze-FeCoB ze-100 nm ubukhulu zifudunyezwe kumaqondo okushisa angama-700, 800, kunye ne-900 ° C, ngokulandelanayo.Xa uluhlu lweqondo lokushisa lungaphantsi kwe-700 ° C, akukho kudibanisa okubalulekileyo phakathi kwedayimane kunye ne-FeCoB, kwaye izinto ezincinci kakhulu zisuswe emva kokunyangwa kwe-hydrothermal.Ukususwa kwezinto kuphuculwe ukuya kumaqondo obushushu angaphezu kwama-800 °C.
Xa iqondo lobushushu lifikelela kuma-900°C, izinga lokuncipha linyuke kabini xa lithelekiswa neqondo lobushushu le-800°C.Nangona kunjalo, iprofayili yommandla ochongiweyo yahluke kakhulu kuleyo yolandelelwano lwe-etch emiliselweyo (FeCoB).
I-Schematic ebonisa umbono we-etchant yesimo esiluqilima ukwenza ipateni: Ukukhethwa kwendawo eqinileyo yedayimani kusetyenziswa i-FeCoB efotwe ngokwefotografi.Ikhredithi yomfanekiso: uVan Z. kunye noShankar MR et al., Iidayimani kunye nezinto eziNxulumene nazo.
Iisampuli ze-FeCoB ze-100 nm ubukhulu kwiidayimani zicutshungulwe kwi-800 ° C kwi-30, i-60, kunye ne-90 imizuzu, ngokulandelanayo.
I-roughness (Ra) yendawo eqingqiweyo inqunywe njengomsebenzi wexesha lokuphendula kwi-800 ° C.Ukuqina kweesampulu emva kokuxutywa kwemizuzu engama-30, 60 kunye ne-90 yayiyi-186±28 nm, 203±26 nm kunye ne-212±30 nm, ngokulandelanayo.Ngobunzulu be-etch ye-500, i-800, okanye i-100 nm, umlinganiselo (RD) woburhabaxa bendawo ekroliweyo ukuya kubunzulu be-etch yi-0.372, 0.254, kunye ne-0.212, ngokulandelanayo.
Uburhabaxa bendawo echongiweyo abunyuki kakhulu ngokunyusa ubunzulu be-etching.Kufunyaniswe ukuba ubushushu obufunekayo kwimpendulo phakathi kwedayimani kunye ne-HM etchant bungaphezulu kwe-700°C.
Iziphumo zophononongo zibonisa ukuba i-FeCoB inokususa ngempumelelo idayimani ngesantya esikhawulezayo kunokuba yiFe okanye i-Co yodwa.
Ixesha lokuposa: Aug-31-2023