Kungekudala, abahlobo abaninzi babuza malunga neempawu zokujoliswa kwe-molybdenum sputtering.Kwishishini le-elektroniki, ukuze kuphuculwe ukusebenza kakuhle kwe-sputtering kunye nokuqinisekisa umgangatho weefilimu ezifakwe kwi-deposit, zithini iimfuno zeempawu ze-molybdenum sputtering targets?Ngoku iingcali zobugcisa ezivela kwi-RSM ziya kusichazela.
1. Ubunyulu
Ucoceko oluphezulu luyimfuneko esisiseko yethagethi ye-molybdenum sputtering.Ukuphakama kokucoceka kwethagethi ye-molybdenum, ingcono ukusebenza kwefilimu ene-sputtered.Ngokuqhelekileyo, ukucoceka kwethagethi ye-molybdenum sputtering kufuneka ibe ubuncinane be-99.95% (iqhezu lobuninzi, okufanayo ngezantsi).Nangona kunjalo, ngokuphuculwa okuqhubekayo kobungakanani beglasi yeglasi kwimboni ye-LCD, ubude be-wiring bufuneka ukuba kwandiswe kwaye ububanzi bomgca kufuneka bube mncinci.Ukuze kuqinisekiswe ukufana kwefilimu kunye nomgangatho we-wiring, ukucoceka kwethagethi ye-molybdenum sputtering kuyafuneka ukuba kwandiswe ngokufanelekileyo.Ngoko ke, ngokobukhulu be-substrate yeglasi egayiweyo kunye nendawo yokusetyenziswa, ukucoceka kwethagethi ye-molybdenum sputtering kufuneka ibe yi-99.99% - 99.999% okanye ngaphezulu.
Ithagethi ye-Molybdenum sputtering isetyenziswa njengomthombo we-cathode kwi-sputtering.Ukungcola okuqinileyo kunye neoksijini kunye nomphunga wamanzi kwi-pores yimithombo ephambili yongcoliseko lweefilimu ezifakwe.Ukongeza, kwishishini lombane, kuba i-alkali yensimbi ion (Na, K) kulula ukuba ibe yi-ion ehambayo kwi-insulation layer, ukusebenza kwesixhobo sokuqala kuyancitshiswa;Izinto ezinjenge-uranium (U) kunye ne-titanium (TI) ziya kukhutshwa i-α X-ray, okukhokelela ekuqhekekeni okuthambileyo kwezixhobo;I-iron kunye ne-nickel ion ziya kubangela ukuvuza kwe-interface kunye nokwanda kwezinto ze-oxygen.Ngoko ke, kwinkqubo yokulungiswa kwethagethi ye-molybdenum sputtering, ezi zinto zokungcola kufuneka zilawulwe ngokungqongqo ukuze kuncitshiswe umxholo wazo kwithagethi.
2. Ubungakanani beenkozo kunye nokuhanjiswa kobungakanani
Ngokuqhelekileyo, i-molybdenum sputtering target yi-polycrystalline structure, kwaye ubungakanani beenkozo bungahluka ukusuka kwi-micron ukuya kwi-millimeter.Iziphumo zovavanyo zibonisa ukuba isantya sokutshiza koko kujoliswe kuko ngeenkozo ezicolekileyo sikhawuleza kuneso sojoliso lweenkozo ezirhabaxa;Kwithagethi enomahluko omncinci wobungakanani beenkozo, ukusabalalisa ubukhulu befilimu egciniweyo nayo ifana kakhulu.
3. Ukuqhelaniswa nekristale
Ngenxa yokuba ii-athom ekujoliswe kuzo kulula ukuba zitshizwe ngokukhethekileyo kwicala lelona lungiselelo lisondeleyo le-athomu kwicala elimacala amathandathu ngexesha lokufafaza, ukuze kuphunyezwe elona zinga liphezulu lokufafaza, izinga lokutshiza lidla ngokunyuka ngokuguqula ubume bekristale koko kujoliswe kuko.Ulwalathiso lwekristale ekujoliswe kulo nalo lunempembelelo enkulu kubukhulu obufanayo befilimu ephothiweyo.Ngoko ke, kubaluleke kakhulu ukufumana isakhiwo esijoliswe kwikristale esijoliswe kwinkqubo ye-sputtering yefilimu.
4. Ukuxinana
Kwinkqubo yokutshiza, xa ithagethi yokutshiza enoxinaniso oluphantsi iqhushumba, irhasi ekhoyo kwimibhobho yangaphakathi yethagethi ikhutshwa ngesiquphe, nto leyo ekhokelela ekutshizweni kwamasuntswana ekujoliswe kuwo okanye amasuntswana, okanye imathiriyeli yefilim idutyulwe. ngee-electron zesibini emva kokwenziwa kwefilimu, okukhokelela ekutshizeni kwamasuntswana.Ukubonakala kwezi ngqungquthela kuya kunciphisa umgangatho wefilimu.Ukuze kuncitshiswe ii-pores kwithagethi eqinileyo kunye nokuphucula ukusebenza kwefilimu, i-target sputtering ifunwa ngokubanzi ukuba ibe noxinzelelo oluphezulu.Kwithagethi ye-molybdenum sputtering, ukuxinana kwayo kufuneka kube ngaphezu kwe-98%.
5. Ukubophelela kwethagethi kunye netshisi
Ngokuqhelekileyo, i-molybdenum sputtering target kufuneka idibaniswe ne-oxygen free copper (okanye i-aluminium kunye nezinye izinto) i-chassis ngaphambi kokuba i-sputtering, ukwenzela ukuba i-thermal conductivity yethagethi kunye ne-chassis ilungile ngexesha lenkqubo yokutshiza.Emva kokubopha, ukuhlolwa kwe-ultrasonic kufuneka kwenziwe ukuze kuqinisekiswe ukuba indawo engabandakanyiyo yezi zimbini ingaphantsi kwe-2%, ukwenzela ukuba ihlangabezane neemfuno ze-sputtering yamandla aphezulu ngaphandle kokuwa.
Ixesha lokuposa: Jul-19-2022