Umcebisi wobuGcisa we-RSM uya kukwabelana nawe ngeenzuzo ze-cylindrical kunye neplani ye-magnetron sputtering targets?Xa kuthelekiswa nezinye iithagethi ze-magnetron sputtering, iithagethi ze-cylindrical kunye neplani ye-magnetron sputtering zigcina iingenelo zokuguquguquka okulungileyo kokujoliswe kuko kweplani yoxande, kwaye inokwandisa usetyenziso lweethagethi ngezi ndlela zimbini zilandelayo:
(1) Xa amaqela amabini (amane) emingxuma annular kumphezulu ekujoliswe kuyo ifikelele kubunzulu obuthile, undoqo ekujoliswe kuyo (inxalenye umazibuthe) ingajikeleziswa 45 ° ngokunxulumene ityhubhu ekujoliswe, ukuze ezinye iindawo kwityhubhu ekujoliswe kuyo. ezingakhange zidliwe zinokusetyenziswa;
(2) Xa undoqo ekujoliswe kuwo we-cylindrical kunye neplani ye-magnetron sputtering target iyilwe njengondoqo ojikelezayo wethagethi (undoqo ekujoliswe kuwo ujikeleza ngexesha lokufafaza), umphezulu wethagethi unokuchaphazwa ngokulinganayo umaleko ngomaleko ngaphandle kwemingxuma.Ngeli xesha, ithagethi iya kusetyenziswa kakhulu ngempumelelo, kwaye izinga lokusetyenziswa koko kujoliswe kuko lingafikelela kwi-50% ~ 60% Xa imathiriyeli ekujoliswe kuyo iyintsimbi exabisekileyo, oku ngokucacileyo kubaluleke kakhulu.
Ngokusebenzisa umgaqo wemagnethi enezihlangu zepali kwithagethi ye-coaxial cylindrical sputtering yemagnetron ukusombulula ingxaki yokuphela kommandla wemagnethi, indawo ekujoliswe kuyo yenqwelomoya enoxande inokuguqulwa ibe yithagethi yecylindrical kunye neplani yemagnetron yokutshiza, Ithagethi inokunyusa izinga lokusetyenziswa koko kujoliswe kuko. ngelixa ugcina ukufana okuhle kokwaleka kwethagethi yenqwelomoya exande Ukuze kuphuculwe iinzuzo zoqoqosho.
Ixesha lokuposa: Jul-04-2022